Volume 10 - "EMERGING TECHNOLOGIES FOR RF AND MILLIMETER WAVES CIRCUITS"

CONTENT:
 

FOREWORD

9

RECONFIGURABLE PATCH-ANTENNA BASED ON A VERY LOW COMPLEXITY RF-MEMS TECHNOLOGY ON SILICON
C. M. SIEGEL, W. GAUTIER, V. ZIEGLER, U. PRECHTEL, H. SCHUMACHER
Abstract

11

BEAM STEERING MEMS mm-WAVE REFLECTARRAYS
L. MARCACCIOLI, B. MENCAGLI, R. VINCENTI GATTI, T. FEGER, T. PURTOVA, H. SCHUMACHER, R. SORRENTINO
Abstract

19

GaAs MEMBRANE-SUPPORTED YAGI-UDA ANTENNA 45 GHz RECEIVER
A. STAVINIDRIS, A. MULLER, D. NECULOIU, D. VASILACHE, M. DRAGOMAN, I. PETRINI, G. KONSTANTINIDIS, Z. CHATZOPOULOS, L. BARY, R. PLANA
Abstract

26

ELECTROSTATIC MEASUREMENT OF STRESS-INDUCED CURVATURE
V. LEUS, A. HIRSHBERG, T. LISEC, D. ELATA
Abstract

34

A FABRICATION APPROACH FOR PASSIVE RF-ELEMENTS ON THE TOP OF COMPLETE MANUFACTURED SEMICONDUCTOR WAFERS
C. KLUG, A. HUERRICH, W. BARTHEL, I. SCHWEIZER, L. NUESKE,T. HAASE, P. BIBAS, W.-J. FISCHER
Abstract

41

INTEGRATION OF AN ELECTROMECHANICAL COMPONENT ON A SILICON SUBSTRATE
V. GEORGEL, F. VERJUS, E. C. E. VAN GRUNSVEN, P. POULICHET, G. LISSORGUES, S. CHAMALY
Abstract

47

PLATINUM: A THERMALLY STABLE MATERIAL FOR RF-MEMS
P. EKKELS, R. PUERS, H. A. C. TILMANS
Abstract

56

COMPACT LUMPED ELEMENTS MICROMACHINED BAND-PASS FILTERS WITH DISCRETE SWITCHING FOR 1.8/5.2 GHz APPLICATIONS
D. NECULOIU, A. MULLER, D. VASILACHE, C. BUICULESCU, A. TAKACS, F. GIACOMOZZI

Abstract

65

DOUBLE STANDARD MEMS TUNABLE FILTER FOR A RECONFIGURABLE FRONT-END
C. PALEGO, A. POTHIER, P. BLONDY
Abstract

73

TUNABLE MEMS BAND-STOP FILTER
S. Simion, G. Bartolucci, R. Marcelli, G. Sajin

Abstract

80

CHARACTERIZATION OF DIELECTRIC-CHARGING EFFECTS IN RF-MEMS CAPACITIVE SWITCHES
M. LAMHAMDI, J. GUASTAVINO, L. BOUDOU, Y. SEGUI, P. PONS, R. PLANA

Abstract

89

RELIABILITY AND POWER HANDLING ISSUES IN OHMIC SERIES AND SHUNT CAPACITIVE RF MEMS SWITCHES
S. CATONI, S. Di NARDO, P. FARINELLI, F. GIACOMOZZI, G. MANNOCCHI, R. MARCELLI, B. MARGESIN, P. MEZZANOTTE, V. MULLONI, R. SORRENTINO, F. VITULLI, L. VIETZORRECK

Abstract

95
RF MEMS CHARACTERIZATION PLATFORM BASED ON MICROWAVE INSTRUMENTATION
D. GIRBAU, L. PRADELL, A. LÁZARO, N. OTEGI

Abstract
103
RF MEMS RELIABILITY FOR SPACE APPLICATIONS
S. Di NARDO, E. Di PAOLA, G. MANNOCCHI, U. DIMARCANTONIO, P. FARINELL, M. FEUDALE, R. MARCELLI, B. MARGESIN, P. MEZZANOTTE, F. VITULLI, L. VIETZORRECK

Abstract
112
A DC-3 GHz BISTABLE NON-REFLECTIVE SP4T MEMS SWITCH
L. DUSSOPT, S. LAFOY, E. FOND

Abstract
117
PIEZOELECTRICALLY ACTUATED RF-MEMS VARIABLE CAPACITORS
G. KLAASSE, L. A. FRANCIS, R. PUERS, H. A. C. TILMANS
Abstract
124
METAL TO METAL AND CAPACITIVE CONTACT RF MEMS SHUNT SWITCH STRUCTURES
H. I. ATASOY, K. TOPALLI, M.UNLU, I. ISTANBULLUOGLU, E. U. TEMOCIN, O. BAYRAKTAR, S. DEMIR, O. A. CIVI, S. KOC, T. AKIN

Abstract
132
FLIP CHIP ASSEMBLED HIGH-Q MICRO-INDUCTORS FOR RF-IC APPLICATIONS
J. ZENG, C. H. WANGTP, A. J. SANGSTER

Abstract
139
MEMS TUNABLE CAPACITOR WITH LATERALLY DRIVEN FRAGMENTED ELECTRODES AND ELECTRO-THERMAL ACTUATION
A. MEHDAOUI, D. TSAMADOS, F. CASSET, A. M. IONESCU, P. ANCEY

Abstract
146
HIGHLY RELIABLE WIDEBAND SWITCHED MEMS CAPACITORS
T. VÄHÄ-HEIKKILÄ, M. YLÖNEN

Abstract
154
NEW DEVELOPMENTS OF GaN MEMBRANE BASED FBAR STRUCTURES
D. NECULOIU, A. MULLER, D. VASILACHE, A. KOSTOPOULOS, A. ADIKIMENAKIS, G. KONSTANTINIDIS, A. GEORGAKILAS, K. MUTAMBA, C. SYDLO

Abstract
160
SIMULATION, FABRICATION AND EARLY CHARACTERIZATION OF A FULLY PASSIVE KU-BAND POWER LIMITER USING RF-MEMS TECHNOLOGIES AND VACUUM MICROELECTRONICS
A. PHOMMAHAXAY, G. LISSORGUES, C. VASSEURE, L. ROUSSEAU, T. BOUROUINA, P. NICOLE

Abstract
166
SELF-CONSISTENT ANALYSIS OF CARBON NANOTUBE (CNT) TRANSISTORS: STATE-OF-THE-ART AND CRYTICAL DISCUSSION
T. ROZZI, D. MENCARELLI, L. MACCARI, A. DI DONATO, M. FARINA

Abstract
176
DYNAMIC CHARACTERIZATION OF SERIES RF MEMS SWITCHES
B. MARCHETTI, F. CANNELLA, T. CASO, B. MARGESIN, F. GIACOMOZZI

Abstract
182
CAPACITANCE SIMULATION BETWEEN ROUGH SURFACES OF ELECTROSTATICALLY ACTUATED CANTILEVER BEAM STRUCTURES BY REVERSE ENGINEERING METHOD
D. PEYROU, P. PONS, R. PLANA

Abstract
191
IMAGE PARAMETERS DESIGN OF MEMS PHASE SHIFTERS WITH SWITCHED INDUCTORS AND CAPACITORS
A. OCERA, P. FARINELLI, P. MEZZANOTTE, R. SORRENTINO

Abstract
199
ELECTRO-MECHANICAL OPTIMIZATION OF A LOW-VOLTAGE MEMS-BASED SPDT
F. CHERUBINI, P. FARINELLI, B. BISCONTINI, H. YORDANOV, L. VIETZORRECK, R. SORRENTINO

Abstract
207
MEMS DESIGN USING THE FINITE INTEGRATION TECHNIQUE
E. LEROUX, L. SASSI

Abstract
214
MONOLITHICALLY INTEGRATED SQUARE-EXTENSIONAL 13.6 MHz MEMS RESONATOR
P. PEKKO, V. KAAJAKARI, H. RONKAINEN, A. OJA

Abstract
223
SHUNT CAPACITIVE RF-MEMS SWITCHES TUNED FOR S-BAND APPLICATIONS
R. GADDI, A. GNUDI, B. MARGESIN, F. GIACOMOZZI

Abstract
227
HIGH PERFORMANCE RF-MEMS CANTILEVER SWITCH
P. FARINELLI, A. OCERA, B. MARGESIN, F. GIACOMOZZI, R. SORRENTINO

Abstract
234
ANALOG AND DIGITAL RF MEMS VARIABLE CAPACITORS
A. FERRARI, S. CATONI, R. MARCELLI, G. BARTOLUCCI

Abstract
241
FIRST RESULTS ON A MONOSTABLE THERMALLY ACTUATED PARAFFIN-BASED SPST SWITCH FOR COPLANAR WAVEGUIDES
M. Sc. JOHAN BEJHED, A. RYDBERG, H. KRATZ

Abstract
249
ALPHA PARTICLE RADIATION EFFECTS IN RF-MEMS SWITCHES
G. J. PAPAIOANNOU, F. GIACOMOZZI, E. PAPANDREOU, B. MARGESIN

Abstract
255
V-BAND MEMS SWITCH ON GAAS SUBSTRATE WITH 0-LEVEL PACKAGING
A. BOÉ, S. SEOK, N. DEPARIS, M. FRYZIEL, C. LOYEZ, N. ROLLAND, P.A. ROLLAND
Abstract
263
PIEZO-OPERATED MEMS DIELECTRIC PHASE SHIFTER
Y. POPLAVKO, I. GOLUBEVA, Y. PROKOPENKO

Abstract
272
SWITCHED-LINE PHASE SHIFTERS WITH RF MEMS AND PIN-DIODES
M. SCHUHLER, C. SCHMIDT, R. WANSCH, J. WEBER

Abstract
280
A RECONFIGURABLE RF MEMS IMPEDANCE TUNER FOR IMPEDANCE MATCHING OF A TWO-STAGE LOW NOISE AMPLIFIER
M. UNLU, K. TOPALLI, H. I. ATASOY, E. U. TEMOCIN, I. ISTANBULLUOGLU, O. BAYRAKTAR, S. DEMIR, O. A. CIVI, S. KOC, AND T. AKIN

Abstract
292

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