DYNAMIC CHARACTERIZATION OF SERIES RF MEMS SWITCHES
B. MARCHETTI, F. CANNELLA, T. CASO, B. MARGESIN, F. GIACOMOZZI

Abstract. This paper deals with the dynamic characterization of RF MEMS produced by ITC-irst with a coupled experimental-numerical approach. The aim of this work is to demonstrate how a synergy of experimental measurements through laser Doppler vibrometry and a numerical multi-physics FE model is able to completely describe the device’s mechanical behaviour. In fact, the model, validated by comparing the numerical results to the experimental ones, provides information about the critical parameters that influence the electromechanical performance of the switch and is a suitable tool for the design of new devices.