ANALOG AND DIGITAL RF MEMS VARIABLE CAPACITORS
A. FERRARI, S. CATONI, R. MARCELLI, G. BARTOLUCCI

Abstract. RF MEMS shunt switches in coplanar waveguide configuration are proposed as variable capacitors by using a voltage control before the bridge collapse as well as the switch full actuation. Several topologies based on the analog and on the digital response of properly combined single devices have been studied in order to get a wide range of variation for the total capacity.