TUNABLE MEMS BAND-STOP FILTER
S. Simion, G. Bartolucci, R. Marcelli, G. Sajin

Abstract. A MEMS based structure consisting of three topologically identical cells, working as tunable band-stop filter, is presented. Each cell of the filter consists of two parallel CPW stub inductors, series connected to the capacitive MEMS, obtaining a series resonator which is parallel connected to the input and output CPWs. An accurate procedure design is also presented. The filter is analysed for different configuration and MEMS bridge displacement, by using IE3D – Zeland.