MONOLITHICALLY INTEGRATED SQUARE-EXTENSIONAL 13.6 MHz MEMS RESONATOR
P. PEKKO, V. KAAJAKARI, H. RONKAINEN, A. OJA

Abstract. A squareextensional 13.6 MHz MEMS resonator was monolithically integrated with buffer amplifier circuitry fabricated with CMOS process. Integration was performed by utilizing the novel Plugup method.