ZnO-based
Multifunctional Nanostructured Films
V. MUŞAT
Abstract. Transparent ZnO:Al and ZnO:In nanostructured films with n-type
conductivity were prepared by the sol-gel dip-coating technique on Corning
1737 glass substrate, using zinc acetate dihydrate (99.5%), aluminum
chloride hexahydrate (98%) or indium chloride (98%) and 2-methoxyethanol
as raw materials. The crystal structure of the films was determined by
X-ray diffraction. The surface and cross-section morphology of the films
was characterized by scanning electron microscopy (SEM). Optical
transmission and Hall effect properties (charge carriers mobility and
concentration) for these films have been measured. Electrical resistivity
of 2.9 ×
10-3
Ωcm and 8.9 ×
10-3
Ωcm have been obtained for ZnO:Al film 250 nm thick and for ZnO:In film
180 nm thick, respectively. Both films showed a very good optical
transmittance (between 85–90%) within the visible wavelength region. |