SURFACE AND BULK MICROMACHINING TECHNIQUES FOR LUMPED COMPONENTS FILTERS MANUFACTURING
F. GIACOMOZZI, B. MARGESIN, I. PETRINI, D. VASILACHE, D. NECULOIU, C. BUICULESCU, A. MÜLLER, G. KONSTANTINIDIS, T. VÄHÄ-HEIKKILÄ, T. KOSTOPOULOS, Y. PSYCHIAS

Abstract. The paper presents a technology based on bulk and surface micromachining to manufacture lumped elements (capacitors and inductors) based low pass and high pass filter structures, having membrane supported spiral inductors. Test low pass and high pass filter structures are manufactured using silicon as well as GaAs micromachining. These technologies will be also useful in the manufacturing of reconfigurable membrane supported filters for millimeter wave applications.