HIGH-Q PIEZOELECTRICALLY ACTUATED FILTERS
M. ZHU, P. KIRBY

Abstract. A new structure for micro-machined piezoelectric mechanical filters with high-Q is presented. The structure is composed of two silicon cantilevers which have thin film PZT transducers deposited on top of each and are mechanically connected together by a silicon linkage. The coupling produces additional resonances compared with ladder type filters composed of uncoupled cantilevers, and a significant increase in Q has been predicted of about a few hundred times higher with correct design, than uncoupled cantilevers.