STRESS AND STRESS GRADIENT COMPENSATION TECHNIQUE FOR MEM ACTUATORS
G. KLAASSE, R. PUERS, H.A.C. TILMANS

Abstract. This paper presents a design technique for eliminating the effects of average stress as well as stress gradient in MEM (Micro-Electro-Mechanical) actuators. Existing techniques do not compensate for both effects at the same time. Corrugations are placed in clamped-clamped actuator beams such that film stresses are released and stress gradients do not cause initial deflection at the actuation area.