MEMBRANE ANTENNA FOR SILICON BASED 3D INTEGRATED MICROSYSTEMS
E. ÖJEFORS, H. KRATZ, A. RYDBERG

Abstract. A membrane slot loop antenna for integrated silicon microsystems has been realized. A thick copper metallization based membrane process has been developed in order to minimize the metallic as well as the dielectric losses in the implemented antenna. The conductor backed slot loop antenna yielded a gain of 4 dBi at 32 GHz.