THE DYNAMIC RESPONSE OF VOLTAGE AND CHARGE DRIVEN ELECTROSTATIC SWITCHES
V. LEUS, D. ELATA

Abstract. The un-damped dynamic response of voltage and charge-driven electrostatic switches is analyzed. It is shown that charge actuation can drastically reduce the impact velocity between the electrodes and can suppress switch release vibrations. In capacitive switches, charge actuation can considerably reduce the maximal electrostatic field within the dielectric layer.