ABOVE IC AND EMBEDDED RFMEMS IN SOC INTEGRATION: A NEW MICROSYSTEMS PLATFORM FOR MOBILE SERVICE AND APPLICATIONS
P. ANCEY

Abstract. In SOC integration, RF-MEMS components are directly built monolithically upon or within the chip itself. Interest of SOC approach is illustrated on works relative to BAW, micro-switch & electromechanical resonator. Two integrations of resonator are investigated: thin SOI wafer and Silicon On Nothing (SON) technology with epitaxial mono-crystalline silicon membrane.