ABOVE IC AND
EMBEDDED RFMEMS IN SOC INTEGRATION: A NEW MICROSYSTEMS PLATFORM FOR MOBILE
SERVICE AND APPLICATIONS
P. ANCEY
Abstract. In SOC integration, RF-MEMS components are directly built
monolithically upon or within the chip itself. Interest of SOC approach is
illustrated on works relative to BAW, micro-switch & electromechanical
resonator. Two integrations of resonator are investigated: thin SOI wafer
and Silicon On Nothing (SON) technology with epitaxial mono-crystalline
silicon membrane. |