INVESTIGATION OF
INJECTED CARRIER INDUCED POLARIZATION IN MIM CAPACITORS
M. EXARCHOS, V. THEONAS, S. PSYCHIAS, G. KONSTANTINIDIS, G. PAPAIOANNOU
Abstract. The paper investigates the charging that is induced by current
injection in dielectric films of MIM capacitors. The amphoteric nature of
contributing defects is confirmed under both positive and negative
injected currents. The trapped charge induced polarization gives rise to
discharge currents that can be described through a stretched exponential
relaxation process. This process is thermally activated and depends on the
applied electric field magnitude. |