STATE-OF-THE-ART IN DESIGN FOR MANUFACTURING AND DESIGN AUTOMATION OF RF MEMS
G. SCHRÖPFER

Abstract. Today a RF MEMS designer is confronted with a number of challenges, such like complex coupled three dimensional multi-physical phenomena, unknown material property data, large variations in manufacturing processes, the issue of integrating packaging and chip etc. This paper will describe some recent MEMS CAD tool developments with particular emphasis on the integration of Design for Manufacturing (DFM) principles into a state-of-the-arte RF MEMS design flow.