CIRCUITAL MODELLING OF COPLANAR SERIES RF-MEMS SWITCHES
R. MARCELLI, G. BARTOLUCCI, G. MINUCCI, B. MARGESIN, F. GIACOMOZZI, F. VITULLI

Abstract. Micromachined coplanar RF-MEMS switches in series configuration have been realized and tested. A circuital approach based on an analytical approach has been used to obtain a lumped equivalent circuit to model the ON and OFF states up to 20 GHz.
Key words: RF-MEMS, Switches.