Electromagnetic and Electromechanical Study of a H-Shaped Millimeter MEMS Shunt Switch

Federico CASINI¹, Romain CRUNELLE², Michel FRYZIEL², Natalie ROLLAND², Paul Alain ROLLAND², Paola FARINELLI¹, Roberto SORRENTINO<sup>1

1</sup>University of Perugia, DIEI, Via G. Duranti 93, 06125 Perugia, ITALY
Phone: +39-075-585-3658; Fax: +39-075-585-3654
²Université des Sciences et Technologies de Lille, IEMN, Avenue Poincaré,
B.P. 69, 59652 Villeneuve d'Ascq, France
Phone: +33.3.20.19.79.79

Abstract. This paper presents the electromagnetic and electromechanical design of a new H-shaped millimeter RF MEMS switch for high frequency applications. The switch is a fixed-fixed metal beam placed in a shunt configuration over a coplanar waveguide transmission line. A numerical model of the switch has been developed in order to analyze the influence of its parameters on both the electromagnetic and electro-mechanical domains. Measurements of fabricated prototypes have been performed in order to compare simulated and experimental results, showing very good agreement.