On-Wafer Method for Experimental Characterization of Mems Matrix, Using a Two-Port Vector Network Analyzer

S. SIMION¹, R. MARCELLI², G. BARLOLUCCI³, G. SAJIN¹, F. CRACIUNOIU<sup>1

1</sup>National Institute for Research and Development in Microtechnologies,
Erou Iancu Nicolae 126A, Bucharest, 077190, Romania
E-mail: [email protected], [email protected], [email protected]
²CNR – Institute for Microelectronics and Microsystems, Microwave Microsystems Group
Via del Fosso del Cavaliere 100, Rome, 00133, Italy
E-mail: [email protected]
³University of Rome “Tor Vergata”, Department of Electronics Engineering
Via del Politecnico 1, Rome, 00133, Italy
E-mail: [email protected]

Abstract. The paper presents an experimental method useful to characterize a multiport circuit, in particular a MEMS (Micro-Electro-Mechanical System) matrix, using a two-port VNA (Vector Network Analyzer). As example, the method is applied for a four-port circuit (a coupler). The results obtained by using this method and the expected results obtained by simulation are in good agreement.