Stiction Induced by Dielectric Breakdown on RF-MEMS Switches

A. TAZZOLI, E. AUTIZI, V. PERETTI, G. MENEGHESSO

University of Padova, Department of Information Engineering, Via Gradenigo 6/b, 35100, Padova, Italy, Phone: +39 049 827 7664
E-mail: [email protected]

Abstract. Dielectric breakdown of the insulator between suspended membrane and actuation layer under anchorages can lead to a new stiction mechanism on electrostatically actuated RF-MEMS switches. Actuator current is investigated as an indicator of stiction issues, and charge trapping phenomena. A simple design guide-line to improve RF-MEMS switches reliability is also furnished.