Modelling an Fabrication of FBARs based on Nitrides Micromachined Membranes

D. NECULOIU¹, A. MULLER¹, G. KONSTANTINIDIS², C. MOROSANU³, D. VASILACHE¹, A. KOSTOPOULOS², A. STAVRINIDIS<sup>2

1</sup>IMT-Bucharest, Romania
²FORTH Heraklion, Greece
³NIMP Bucharest, Romania

No abstract available