Low-Loss DMTL Phase Shifter Based on Fast Miniature RF MEMS Switched Capacitors

B. LACROIX, A. POTHIER, A. CRUNTEANU, P. BLONDY

XLIM UMR 6172, Université de Limoges / CNRS, 123 avenue Albert Thomas, 87060 Limoges Cedex, France

Abstract. This paper presents fast miniature RF MEMS switched capacitors used to design and fabricate 90 and 180 degree DMTL phase shifters operating at 20 GHz. The capacitors are only 40x40 μm² and 0.35 μm thick and are actuated with a 24 V monopolar bias voltage. Minimum measured switching time is around 1 μs. Both 90 and 180 degree sections are respectively less than 4.5 and 8.5 mm long. Measured insertion loss is 90°/dB for both sections, and return loss is better than -13 dB and -11 dB. This work presents an improvement in fast reconfigurable network designs based on miniature RF MEMS components.