Can Micromachining Help us to Fill the ‘Terahertz Gap’?

Andrew J. GALLANT

School of Engineering, Durham University, South Road, Durham, UK, DH1 3LE, Phone:+44 191 334 2525

Abstract. The terahertz region of the electromagnetic spectrum has received considerable attention in recent years but has been largely overlooked by the microsystems community. This paper shows how high aspect ratio micromachining can be used to fabricate terahertz based devices. It also identifies the areas where micromachining can provide a valuable contribution to help fill the so-called ‘terahertz gap’.