Investigation of Dielectric Charging Mechanisms in Al2O3 RF-MEMS Capacitive Switches

E. PAPANDREOU¹, A. CRUNTEANU², G. PAPAIOANNOU¹, P. BLONDY², F. DUMAS-BOUCHIAT³, C. CHAMPEAUX³, A. CATHERINOT<sup>3

1</sup>University of Athens, Solid State Physics Section, Athens 15784,Greece
Phone: +302107276817
²XLIM Research Institute, 123 Avenue Albert Thomas, Limoges 87060 Cedex, France
Phone: +33555457731
³SPCTS-CNRS, University of Limoges, Department, Street, Limoges 87060 Cedex, France
Phone: +33555457200

Abstract. The dielectric charging processes have been investigated in RF MEMS capacitive switches with Al2O3 dielectric. The investigation has been performed by employing both MIM capacitors and MEMS switches.