Low Loss Piezoelectric SPMT RF MEMS Switches

David J. CHUNG¹, Ronald G. POLCAWICH², Daniel JUDY², Jeffrey PULSKAMP², John PAPAPOLYMEROU<sup>1

1</sup>Georgia Institute of Technology, Electrical and Computer Engineering, Atlanta, GA, USA
²US Army Research Laboratory, AMSRD-ARL-SE-RL, 2800 Powder Mill Rd., Adelphi, MD, USA

Abstract. This paper presents Single Pole Double Throw (SP2T) and Single Pole Four Throw (SP4T) switches using piezoelectric micro-electro-mechanical (MEMS) switches measured from DC to 50 GHz. The overall performance of the switches shows better than 20 dB isolation up to 50 GHz when the MEMS switches are in the off or zero volt state. When the switches are actuated with 7 V, the SP2T shows less than 1.8 dB of insertion loss while the SP4T on average, shows less than 2 dB of insertion loss up to 40 GHz.