REDUCTION OF STICKING EFFECT IN MICRO-SWITCH BY RESTORING FORCE ENHANCEMENT
H. ACHKAR, D. PEYROU, F. PENNEC, P. PONS, R. PLANA, M. SARTOR

Abstract. In this paper, we tried to find a solution for the sticking of the RF-Micro switch by proposing a structure which ameliorates the restoring force without changing the pull-in voltage. First we showed the need of different stiffness of the structure between the state before actuation and after it collapses. An analytical model is then derived to study the efficiency of our solution.