TUNABLE BANDSTOP MEMS FILTERS FOR Ka AND V-BAND APPLICATIONS
A. TAKACS, D. NECULOIU, D. VASILACHE, A. MULLER, P. PONS, L. BARY,
P. CALMON, R. PLANA, H. AUBERT
Abstract.
This paper addresses the design and the realization of millimeter wave
tunable bandstop filters using MEMS (Micro-Electro-Mechanical-Systems)
technology. Three new topologies and the associated design methodology are
presented. The presented measurement and simulation results validate the
proposed topologies. The tunable behavior is achieved using MEMS switches.
These switches, based on original topology of Two Cantilever Shunt Switch
(TCSS), have a typical shunt switch behavior and intrinsic low actuation
voltage. In order to minimize the insertion losses, the overall
structures, including TCSS, have been manufactured using dielectric
membrane. |