TUNING BEAM ELECTROMECHANICAL RESONATORS
F. CASSET, C. DURAND, P. ANCEY, M. AÏD, L. BUCHAILLOT

Abstract. MEMS or NEMS electromechanical resonators are intensively studied since many years. Due to their high resonant frequency compared to the quartz, their high Q factor and their CMOS compatible process, these components could bring an important added value in time reference applications. Today MEMS resonator maturity seems to be sufficient for industrial perspectives. Indeed, emerging companies proposed their first MEMS-based oscillator products. Furthermore, a very weak frequency shift is necessary for this application. So, we propose in this paper a tuning beam design used for beam resonator frequency tuning. We used the FEM Coventor ® software to design an in-plane 38.2 MHz flexural clamped–clamped beam resonator with tuning beam design. The FEM simulation predicts 0.1% (1 000 ppm) frequency variation under 18 V. We used the Silicon on Nothing (SON) process to build devices. Today, RF measurements are in progress in the aim to confirm the FEM study on the tuning beam design.