MICROFABRICATION OF HIGH FREQUENCY RECTANGULAR COAXIAL CABLE USING SU8 PHOTORESIST
M. KE, Y. WANG, J. ZHOU, K. JIANG, M.J. LANCASTER

Abstract. A rectangular coaxial cable has been fabricated using thick SU8 photoresist technology. The fabrication method is based on the traditional photolithographic technology to define precise patterns for any given design on a thick SU8 photoresist film, and then turns the patterned SU8 photoresist into a strongly crosslinked durable polymer material. By coating the strongly cross-linked SU8 pieces with a thin uniform gold film and then bonding them together layer by layer, components operating at microwave or millimetre wave frequencies can potentially be made. Here a high performance coaxial cable is presented with a resulting low insertion loss of 0.6dB and return loss of better than -15dB. The cable operates at a frequency of about 22 GHz.