GaAs
MEMBRANE-SUPPORTED 60 GHz RECEIVER WITH YAGI-UDA ANTENNA
D. NECULOIU, G. KONSTANTINIDIS, T. VÄHÄ-HEIKKILÄ, A. MÜLLER, D.
VASILACHE, A. STAVINIDRIS, L. BARY, M. DRAGOMAN, I.PETRINI, C. BUICULESCU,
Z. HAZOUPULOS, N. KORNILIOS, P. PURSULA, R. PLANA, D. DASCALU
Abstract.
This paper presents the design, fabrication and characterization of a GaAs
membrane supported millimeter wave receiver operating in the 60 GHz
frequency range. The design approach includes intensive electromagnetic
simulation and modeling. The fabrication processes is based on GaAs
micromachining and the Schottky diode is monolithically integrated with
the Yagi-Uda antenna on the same
2.2 µm thin semi-insulating GaAs membrane. |