MNE - Series in "Micro and Nanoengineering"

Volume 8 - "MEMS TECHNOLOGIES FOR RF AND MILLIMETER WAVE CIRCUITS"

CONTENT:

CARBON NANOTUBES FOR NEMS AND RF NEMS J.P. BOURGOIN, V. DERYCKE, M.F. GOFFMAN, R. LEFEVRE Abstract	11
SWITCHING MICROWAVES USING MOTT MATERIALS A. CISMARU, M. DRAGOMAN, H. HARTNAGEL Abstract	20
AlSi-BASED RF MEMS DEVICES WITH INTRINSIC MOS DETECTION N. ABELÉ, M. FERNANDEZ-BOLAÑOS, R. FRITSCHI, F. CASSET, P. ANCEY, A.M. IONESCU Abstract	25
MEMS IN ANTENNAS A.K. SKRIVERVIK, P. CRESPO-VALERO Abstract	31
MEMS-SCHWITCHED RECONFIGURABLE ANTENNAS L. PETIT, P. PANAIA, C. LUXEY, G. JACQUEMOD, R. STARAJ, L. DUSSOPT, J.-M. LAHEURTE Abstract	37
RECONFIGURABLE ANTENNA STRUCTURES USING MEMS TECHNOLOGY E. ERDIL, S. ONAT, K. TOPALLI, I. ISTANBULLUOGLU, M. UNLU, S. DEMIR, L. ALATAN, O. AYDIN CIVI, S. KOC, T. AKIN Abstract	46
STATE-OF-THE-ART IN DESIGN FOR MANUFACTURING AND DESIGN AUTOMATION OF RF MEMS G. SCHRÖPFER Abstract	52
ORIGIN AND EFFECTS OF INTERMODULATION IN RF MEMS CAPACITORS D. GIRBAU, N. OTEGI, A. LÁZARO, L. PRADELL Abstract	58
REFLECTARRAY CELL WITH INTEGRATED BAND REJECT FILTER FOR MEMS BASED BEAMFORMING APPLICATIONS S. AVRILLON, L. MERCIER, A. POTHIER, P. BLONDY Abstract	67
A NEW TOPOLOGY FOR THE REDUCTION OF THE MISMATCH IN MULTI-BIT DISTRIBUTED MEMS TRUETIME-DELAY LINES J. PERRUISSEAU-CARRIER, A. SKRIVERVIK Abstract	73
ULTRA-THIN, HIGHLY FLEXIBLE RF CABLES H. BURKARD, U. BRUNNER, K. KURZ, J. LINK Abstract	79
ELECTROMAGNETIC MODELING OF GaN FBAR STRUCTURES D. NECULOIU, G. KONSTANTINIDIS, K. MUTAMBA, A. TAKACS, D. VASILACHE, C. SYDLO, T. KOSTOPOULOS, A. STAVRINIDIS, A. MÜLLER Abstract	83
HIGH-POWER MEMS VARACTORS C. PALEGO, A. POTHIER, P. BLONDY Abstract	89
INVESTIGATION OF INJECTED CARRIER INDUCED POLARIZATION IN MIM CAPACITORS M. EXARCHOS, V. THEONAS, S. PSYCHIAS, G. KONSTANTINIDIS, G. PAPAIOANNOU Abstract	94
FOTURAN MICROMACHINED PACKAGES FOR RF MEMS SWITCHES D. PEYROU, P. PONS, A. NICOLAS, J.W. TAO, H. GRANIER, R. PLANA Abstract	100
A NEW TOPOLOGY OF RF MEMS SHUNT SWITCH FOR RECONFIGURABLE SYSTEMS APPLICATIONS A. TAKACS, D. VASILACHE, C. TIBEICA, D. NECULOIU Abstract	107
POWER HANDLING RF-MEMS SWITCHES OPTIMIZATION TROUGH A MULTIPHYSIC NUMERICAL ENVIRONMENT F. COCCETTI, B. DUCAROUGE, D. DUBUC, K. GRENIER, R. PLANA Abstract	114
A LINEAR MODEL FOR PHASE NOISE IN SILICON MICROELECTRO-MECHANICAL RESONATOR OSCILLATORS A. SHESHIA Abstract	123
INTEGRATED RF MICROSYSTEMS WITH CMOS-MEMS COMPONENTS G. K. FEDDER, T. MUKHERJEE Abstract	129
RF MEMS INDUSTRY OVERVIEW J. BOUCHAUD, H. WICHT Abstract	140
HIGH PERFORMANCE COPPER/POLYIMIDE INDUCTORS FABRICATED USING THICK DOUBLE METALLAYER DAMASCENE PROCESS M. PISANI, C. HIBERT, D. BOUVET, C. DEHOLLAIN, A. M. IONESCU Abstract	145
ABOVE IC AND EMBEDDED RFMEMS IN SOC INTEGRATION: A NEW MICROSYSTEMS PLATFORM FOR MOBILE SERVICE AND APPLICATIONS P. ANCEY Abstract	151
IMPACT OF BIASING SCHEME AND ENVIRONMENT CONDITIONS ON THE LIFETIME OF RF-MEMS CAPACITIVE SWITCHES P. CZARNECKI, X. ROTTENBERG, R. PUERS, I. DE WOLF Abstract	157
THE DYNAMIC RESPONSE OF VOLTAGE AND CHARGE DRIVEN ELECTROSTATIC SWITCHES V. LEUS, D. ELATA Abstract	163
MEMS-BASED WAVEGUIDE SWITCHES R. MANSOUR, M. DANESHMAND Abstract	169
CIRCUIT LEVEL INTEGRATION AND PACKAGING TECHNIQUES FOR HIGH-SPEED APPLICATIONS R.F. DRAYTON, S.R. BANERJEE Abstract	176
MEMBRANE ANTENNA FOR SILICON BASED 3D INTEGRATED MICROSYSTEMS E. ÖJEFORS, H. KRATZ, A. RYDBERG Abstract	185
STRESS AND STRESS GRADIENT COMPENSATION TECHNIQUE FOR MEM ACTUATORS G. KLAASSE, R. PUERS, H.A.C. TILMANS Abstract	190
HIGH-Q PIEZOELECTRICALLY ACTUATED FILTERS M. ZHU, P. KIRBY Abstract	196
STRESS CHARACTERIZATION OF EVAPORATED GOLD LAYERS ON PHOTORESIST FOR RF-SWITCHES K. YACINE, F. FLOURENS, X. LAFONTAN, Q.-H. DUONG, L. BUCHAILLOT, D. PEYROU, P. PONS, R. PLANA Abstract	202
SURFACE AND BULK MICROMACHINING TECHNIQUES FOR LUMPED COMPONENTS FILTERS MANUFACTURING F. GIACOMOZZI, B. MARGESIN, I. PETRINI, D. VASILACHE, D. NECULOIU, C. BUICULESCU, A. MÜLLER, G. KONSTANTINIDIS, T. VÄHÄ-HEIKKILÄ, T. KOSTOPOULOS, Y. PSYCHIAS Abstract	210
MEMS-TUNABLE PHASE SHIFTER AND POWER DIVIDER FOR RECONFIGURABLE ANTENNAS A. OCERA, P. FARINELLI, P. MEZZANOTTE, R. SORRENTINO Abstract	216